Spectroscopic ellipsometry measurement and simulation of mesoporous TiO2 multilayer films

Lu Huang; Yue Shen; Feng Gu; Xudong Xu; Jiancheng Zhang

doi:10.1117/12.792388

11 March 2008 Spectroscopic ellipsometry measurement and simulation of mesoporous TiO₂ multilayer films

Lu Huang, Yue Shen, Feng Gu, Xudong Xu, Jiancheng Zhang

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 698416 (2008) https://doi.org/10.1117/12.792388
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Ordered mesoporous titania thin films have been grown on Si and ITO substrates by evaporation-induced self-assembly (EISA) progress. The films have well-organized honeycomb structures and consisted of anatase nanocrystallites according to the results of HRTEM. Between the regions of wavelength from 400 nm to 1250 nm, the simulation data of the refractive index coefficient (n) is decreased with the wavelength increasing. In contrast, the simulation of the extinction coefficient (k) is decreased quickly before the wavelength of 700 nm, and it is enhanced gradually with the wavelength increasing after the extreme value at about 700 nm. Simulation of n and k of mesoporous TiO₂ multilayer films from the data of transmission spectra are helpful to remedy the lack of spectroscopic ellipsometry measurement, especially in the regions of weak absorbance.

Citation Download Citation

Lu Huang, Yue Shen, Feng Gu, Xudong Xu, and Jiancheng Zhang "Spectroscopic ellipsometry measurement and simulation of mesoporous TiO₂ multilayer films", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 698416 (11 March 2008); https://doi.org/10.1117/12.792388

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