A novel method for fabricating an optical grating element with a fine grating pitch

Kuo-Chi Chiu; Sheng-Li Chang; Ming-Fang Hsu

doi:10.1117/12.780460

14 May 2008 A novel method for fabricating an optical grating element with a fine grating pitch

Kuo-Chi Chiu, Sheng-Li Chang, Ming-Fang Hsu

Author Affiliations +

Proceedings Volume 6992, Micro-Optics 2008; 699212 (2008) https://doi.org/10.1117/12.780460
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

Optical encoders are widely used to detect the position, angle or speed in precise control systems. A rotary optical encoder mainly comprises an optical sensor and an optical grating element with a fine grating pitch. In order to improve the resolution of rotary optical encoders, the grating pitch in the optical grating element should be reduced as small as possible. That is, the pulse per revolution (ppr) in the optical grating element must be increased markedly. However, an optical grating element having over 10,000 ppr is difficult to achieve by traditional methods. In this paper, a novel method is proposed and demonstrated to replicate an optical grating element with a high ppr. Furthermore, the tiny signals generated from fine grating pitches in the optical grating element have been also measured by using a conventional optical pickup head.

Citation Download Citation

Kuo-Chi Chiu, Sheng-Li Chang, and Ming-Fang Hsu "A novel method for fabricating an optical grating element with a fine grating pitch", Proc. SPIE 6992, Micro-Optics 2008, 699212 (14 May 2008); https://doi.org/10.1117/12.780460

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