Capabilities of microinterferometer with digital recording of images for studying micro-objects with sub-nanometer resolution

Nikolay I. Chkhalo; Denis G. Raskin; Nikolay N. Salashchenko

doi:10.1117/12.802458

29 April 2008 Capabilities of microinterferometer with digital recording of images for studying micro-objects with sub-nanometer resolution

Nikolay I. Chkhalo, Denis G. Raskin, Nikolay N. Salashchenko

Author Affiliations +

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 702512 (2008) https://doi.org/10.1117/12.802458
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

Using investigation of micromirrors of space light modulator as well as other objects as an example, real capabilities of the domestically produced interference microscope MII-4 equipped with a digital camera are demonstrated. It is shown that a resolution in a vertical direction provided by the microinterferometer lies in a sub nanometer range.

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Nikolay I. Chkhalo, Denis G. Raskin, and Nikolay N. Salashchenko "Capabilities of microinterferometer with digital recording of images for studying micro-objects with sub-nanometer resolution", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702512 (29 April 2008); https://doi.org/10.1117/12.802458

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