Paper
12 August 2008 Fabrication-tolerant higher order laterally coupled distributed feedback lasers
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Proceedings Volume 7099, Photonics North 2008; 70991P (2008) https://doi.org/10.1117/12.807411
Event: Photonics North 2008, 2008, Montréal, Canada
Abstract
To avoid the commonly required regrowth steps in conventional distributed feedback laser fabrication, laterally-coupled distributed feedback (LC-DFB) lasers lithographically pattern the grating out of the ridge waveguide. Using higher order gratings increases the lithographic tolerances, resulting in lasers that are more amenable to mass-manufacturing techniques, such as stepper lithography. We have extended the modified coupled-mode theory to a two-dimensional cross-section, and thereby identified grating geometries that are both fabrication-tolerant and provide high performance.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Millett, K. Hinzer, T. Hall, and H. Schriemer "Fabrication-tolerant higher order laterally coupled distributed feedback lasers", Proc. SPIE 7099, Photonics North 2008, 70991P (12 August 2008); https://doi.org/10.1117/12.807411
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Cited by 10 scholarly publications.
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KEYWORDS
Lithography

Phase shifts

Refractive index

Waveguides

Laser damage threshold

Laser resonators

Laser manufacturing

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