A system-level simulation of force-balance MEMS accelerometers by VHDL_AMS

Xiaochuan Tang; Yufeng Zhang; Weiping Chen; Xiaowei Liu

doi:10.1117/12.819564

31 December 2008 A system-level simulation of force-balance MEMS accelerometers by VHDL_AMS

Xiaochuan Tang, Yufeng Zhang, Weiping Chen, Xiaowei Liu

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 71300R (2008) https://doi.org/10.1117/12.819564
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

Micromachined accelerometers are one of the most widely used MEMS transducers. The theory of force-balance MEMS accelerometers is presented in the thesis. Meanwhile the paper accomplishes the system-level simulation and analysis of the force-balance MEMS accelerometer with different structure parameters. Based on the analysis, the conclusion is that the parameters of folded-spring (such as the length of the beam, the width of the beam) especially influence the output sensitivity.

Citation Download Citation

Xiaochuan Tang, Yufeng Zhang, Weiping Chen, and Xiaowei Liu "A system-level simulation of force-balance MEMS accelerometers by VHDL_AMS", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300R (31 December 2008); https://doi.org/10.1117/12.819564

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available