Analysis and experimentation of novel asymmetric photo-thermal micro-actuator

Chao Liu; Yulin He; Haijun Zhang; Dongxian Zhang

doi:10.1117/12.819575

31 December 2008 Analysis and experimentation of novel asymmetric photo-thermal micro-actuator

Chao Liu, Yulin He, Haijun Zhang, Dongxian Zhang

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 713011 (2008) https://doi.org/10.1117/12.819575
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

In this article, an innovative micro-actuator based on photo-thermal heating is introduced. The basic ideas are to apply a new way to get large actuation power from laser source. When a beam of laser irradiates a thin sheet, the sheet temperature increases and volume expands. Besides irradiation laser power, convection coefficient and the parameters of sheet material, the length-width ratio of sheet also influences the heating process. Applying this characteristic, an asymmetric photo-thermal actuator was manufactured by the excimer laser micromaching system. Steady-state thermal analysis is presented. Feasibility experiments with a laser diode (655 nm) as the power source were carried out, and the data of deflection have been measured under different laser power. The experiment results prove the availability of these novel photo-thermal micro-actuators, and demonstrate that the deflection can be 11.8 μm at 10 mW laser power. This mirco-actuator doesn't need of the old power supply modes of external electric wire or small battery, and can be operated in non-focused uniform irradiation, so it has more mobility and can be controlled remotely. Furthermore, this actuator can be applied in many special environments.

Citation Download Citation

Chao Liu, Yulin He, Haijun Zhang, and Dongxian Zhang "Analysis and experimentation of novel asymmetric photo-thermal micro-actuator", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713011 (31 December 2008); https://doi.org/10.1117/12.819575

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