Computer aided alignment of 20X Schwarzschild projection optics

Ke Liu; Yanqiu Li; Jingfeng Liu; Cuifang Kuang

doi:10.1117/12.819705

31 December 2008 Computer aided alignment of 20X Schwarzschild projection optics

Ke Liu, Yanqiu Li, Jingfeng Liu, Cuifang Kuang

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 713042 (2008) https://doi.org/10.1117/12.819705
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

An effective computer aided alignment (CAA) scheme based on the singular value decomposition (SVD) of sensitivity matrix is used in the alignment of a set of 20X Schwarzschild projection optics. Alignment simulation is conducted by ray tracing software CODE V to verify the convergence of CAA method within the calculated tolerance limit. The result shows that, with the misalignment value calculated by CAA, fine alignment could be achieved after only one adjustment step. Alignment experiment is also performed according to the CAA scheme. After fine alignment, the measured wavefront error (WFE) is 18nm in rms, which is consistent with the CODE V simulation result in ideal alignment status.

Citation Download Citation

Ke Liu, Yanqiu Li, Jingfeng Liu, and Cuifang Kuang "Computer aided alignment of 20X Schwarzschild projection optics", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713042 (31 December 2008); https://doi.org/10.1117/12.819705

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available