Paper
12 January 2009 Thermal effects researching for laser microstructures synthesis by thermochemical circular laser writing
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Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 713335 (2009) https://doi.org/10.1117/12.811105
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China
Abstract
Features of thermal trace forming by thermochemical circular laser writing in chromium films on glass (quartz) substrates are considered on the basis of thermal equation system solution. Linear (thermal parameters do not dependence on temperature) and nonlinear (thermal parameters dependence on temperature) models are considered. It is showed that linear model is enough for thermal trace broads consideration. Calculation of thermal field is provided for wide range of linear scanning velocities (from 1.2 up to 9.4 m/sec). Dynamics of chromium film heating when laser beam is switched on is researched. Difference of the thermal trace form in switching on area and switching off area is showed. Also structures like chess board are synthesized for experimental investigation. Influence of thermal processes inertness on the broadband image parameters is considered on such samples experimentally. Recommendations for experimental selection of writing power have been done.
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Vladislav G. Nikitin "Thermal effects researching for laser microstructures synthesis by thermochemical circular laser writing", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713335 (12 January 2009); https://doi.org/10.1117/12.811105
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