Microlens testing: an application

Hooi Leng Ng-Lee; Seach Chyr Ernest Goh; Chris Stephen Naveen Ranjit; . Maryanto; Jie Ying Sarah Ng; Anand Asundi

doi:10.1117/12.814595

3 October 2008 Microlens testing: an application

Hooi Leng Ng-Lee, Seach Chyr Ernest Goh, Chris Stephen Naveen Ranjit, . Maryanto, Jie Ying Sarah Ng, Anand Asundi

Proceedings Volume 7155, Ninth International Symposium on Laser Metrology; 71552L (2008) https://doi.org/10.1117/12.814595
Event: Ninth International Symposium on Laser Metrology, 2008, Singapore, Singapore

Abstract

A measurement system for measuring effective focal length of a microlens is presented. The system consists of a microprocessor controlled 3-axis stage with an optical system which provides 500 times magnification for focal length and diameter measurement. The focal length testing is carried out by single pass (transmission) approach. A point source from halogen white light is used as the object for the measurement. A CCD camera displays the magnified image on a computer. Focusing is performed by moving the microlens along the principal axis by manual control of a stepper motor and observation of the image on the computer. Similarly, moving the microlens along its substrate plane and capturing three points on its circumference gives its diameter. The co-ordinates of the 3-axis stage and diameter are displayed separately on dot-matrix LCD panel. Anti-backlash mechanisms are employed on all axes, each with a positioning resolution of 1 μm.

Citation Download Citation

Hooi Leng Ng-Lee, Seach Chyr Ernest Goh, Chris Stephen Naveen Ranjit, . Maryanto, Jie Ying Sarah Ng, and Anand Asundi "Microlens testing: an application", Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71552L (3 October 2008); https://doi.org/10.1117/12.814595

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