Study on key algorithm for scanning white-light interferometry

Ailing Tian; Chunhui Wang; Zhuangde Jiang; Hongjun Wang; Bingcai Liu

doi:10.1117/12.814597

3 October 2008 Study on key algorithm for scanning white-light interferometry

Ailing Tian, Chunhui Wang, Zhuangde Jiang, Hongjun Wang, Bingcai Liu

Proceedings Volume 7155, Ninth International Symposium on Laser Metrology; 71552N (2008) https://doi.org/10.1117/12.814597
Event: Ninth International Symposium on Laser Metrology, 2008, Singapore, Singapore

Abstract

Determining the location of the zero order fringes is one of the key aspects in scanning white-light interferometry. The measurement principle of the scanning white-light interferometry is introduced at first; then the location of the zero order fringes as calculated by four different algorithms; namely Weight-center, Phase-shift, Frequency Domain Analysis (FDA), and Coherent Correlation are compared. Finally, numerical simulations on random generated surfaces are done to reach conclusions by comparing and analyzing the results. The research is important in the understanding and development of white-light interferometry.

Citation Download Citation

Ailing Tian, Chunhui Wang, Zhuangde Jiang, Hongjun Wang, and Bingcai Liu "Study on key algorithm for scanning white-light interferometry", Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71552N (3 October 2008); https://doi.org/10.1117/12.814597

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