Direct laser write (DLW) as a versatile tool in manufacturing templates for imprint lithography on flexible substrates

Marius G. Ivan; Jean-Baptiste Vaney; Dick Verhaart; Erwin R. Meinders

doi:10.1117/12.814481

17 March 2009 Direct laser write (DLW) as a versatile tool in manufacturing templates for imprint lithography on flexible substrates

Marius G. Ivan, Jean-Baptiste Vaney, Dick Verhaart, Erwin R. Meinders

Author Affiliations +

Proceedings Volume 7271, Alternative Lithographic Technologies; 72711S (2009) https://doi.org/10.1117/12.814481
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

A computer-controlled laser beam recorder with a wavelength of 405 nm has been employed for patterning the deposited resist with feature sizes varying from a few hundreds of nanometers to tens of micrometers. Four inch silicon templates for hot embossing source/ drain electrodes and metallic circuit for a disposable biosensor were obtained. SEM and optical microscopy reveal accurate transfer of developed photoresist structures into the underlying silicon wafer after plasma dry etching. Etch depths between 100 - 600 nm were obtained on the templates, and were further transferred into the imprinted plastic substrate and the metallic layer.

Citation Download Citation

Marius G. Ivan, Jean-Baptiste Vaney, Dick Verhaart, and Erwin R. Meinders "Direct laser write (DLW) as a versatile tool in manufacturing templates for imprint lithography on flexible substrates", Proc. SPIE 7271, Alternative Lithographic Technologies, 72711S (17 March 2009); https://doi.org/10.1117/12.814481

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available