Uncooled MEMS-based detector arrays for THz imaging applications

J. Allen Cox; R. Higashi; F. Nusseibeh; K. Newstrom-Peitso; C. Zins; R. Osiander; J. Lehtonen; E. Dodson

doi:10.1117/12.818766

30 April 2009 Uncooled MEMS-based detector arrays for THz imaging applications

J. Allen Cox, R. Higashi, F. Nusseibeh, K. Newstrom-Peitso, C. Zins, R. Osiander, J. Lehtonen, E. Dodson

Proceedings Volume 7311, Terahertz Physics, Devices, and Systems III: Advanced Applications in Industry and Defense; 73110R (2009) https://doi.org/10.1117/12.818766
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

We report experimental results on recently developed MEMS-based, uncooled THz detectors and imaging applications for linear focal plane arrays constructed from them. The detector incorporates a broadband micro-antenna coupled to an impedance-matched microbridge. Micro-antennas were fabricated having cut-on frequencies of 500GHz, 650GHz, and 1.5THz, each with bandwidth of several hundred GHz. Sensitivity and frequency response of the detectors is predicted to be ~6pW/√Hz (with backplane) and 7kHz, respectively, and supporting measurements of the first devices will be presented. Fully integrated 1x8 linear focal plane arrays have been assembled and will be used in on-going imaging demonstrations.

Citation Download Citation

J. Allen Cox, R. Higashi, F. Nusseibeh, K. Newstrom-Peitso, C. Zins, R. Osiander, J. Lehtonen, and E. Dodson "Uncooled MEMS-based detector arrays for THz imaging applications", Proc. SPIE 7311, Terahertz Physics, Devices, and Systems III: Advanced Applications in Industry and Defense, 73110R (30 April 2009); https://doi.org/10.1117/12.818766

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