Silicon comb-drive X-Y microstage with frame-in-the-frame architecture for MOEMS applications

Karolina Laszczyk; Sylwester Bargiel; Jerzy Krężel; Christophe Gorecki; Małgorzata Kujawińska

doi:10.1117/12.821460

18 May 2009 Silicon comb-drive X-Y microstage with frame-in-the-frame architecture for MOEMS applications

Karolina Laszczyk, Sylwester Bargiel, Jerzy Krężel, Christophe Gorecki, Małgorzata Kujawińska

Proceedings Volume 7362, Smart Sensors, Actuators, and MEMS IV; 736210 (2009) https://doi.org/10.1117/12.821460
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany

Abstract

In this paper we present the silicon comb-drive X-Y microstage with the frame-in-the-frame architecture intended to be monolithically integrated with a glass microlens as a MOEMS 2D scanner for the Miniaturized Confocal Microscope On- Chip. The microstage is characterized by relatively large travel range (± 35 μm in X-direction and ± 28 μm in Y-direction at 100 V) for a small number of driving electrodes, without noticeable mechanical X-Y crosstalk. We describe the design, ANSYS modeling, fabrication process and static characterization of the device.

Citation Download Citation

Karolina Laszczyk, Sylwester Bargiel, Jerzy Krężel, Christophe Gorecki, and Małgorzata Kujawińska "Silicon comb-drive X-Y microstage with frame-in-the-frame architecture for MOEMS applications", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736210 (18 May 2009); https://doi.org/10.1117/12.821460

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