Structure design and simulation of uncooled infrared sensors

Yuanqing Wu; Suying Yao; Peng Gao; Hongwei He

doi:10.1117/12.834972

5 August 2009 Structure design and simulation of uncooled infrared sensors

Yuanqing Wu, Suying Yao, Peng Gao, Hongwei He

Proceedings Volume 7383, International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications; 73832I (2009) https://doi.org/10.1117/12.834972
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

This paper deals with a complete analytical modeling and analysis of thermoelectric uncooled infrared sensors compatible with CMOS technology. The model put forward is based on dividing the sensor into three zones, each one being the subject of a thorough thermal study (conduction, convection and radiation thermal effect). Through the analytical thermal gradient analysis developed in each zone of the structure (absorber, part of thermoelectric transducer layer placed under the absorber, thermoelectric transducer) we are able to predict the sensitivity, detectivity and the stability power to the sensor. Thus, such a kind of analytical approach is worth of interest to optimize thermopile sensor design parameters.

Citation Download Citation

Yuanqing Wu, Suying Yao, Peng Gao, and Hongwei He "Structure design and simulation of uncooled infrared sensors", Proc. SPIE 7383, International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications, 73832I (5 August 2009); https://doi.org/10.1117/12.834972

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