Small lens testing method using phase shift shearing interferometer

Ryohei Hanayama; Katsuhiro Ishii; Kiyofumi Matsuda

doi:10.1117/12.827723

17 June 2009 Small lens testing method using phase shift shearing interferometer

Ryohei Hanayama, Katsuhiro Ishii, Kiyofumi Matsuda

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73890Y (2009) https://doi.org/10.1117/12.827723
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

In this report, lens testing method for small lenses is discussed. Cylindrical or aspherical lenses are included to the scope of this report in addition to spherical lenses. A shearing interferometer is applied for the measurement. That consists of a plane parallel plate for inducing lateral shear for the test beam. This method is robust to disturbances because it is a common path interferometry. Moreover it is not necessary to prepare reference lens. For these reasons it can be said that this method is practical and is good for using at actual factories.

Citation Download Citation

Ryohei Hanayama, Katsuhiro Ishii, and Kiyofumi Matsuda "Small lens testing method using phase shift shearing interferometer", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73890Y (17 June 2009); https://doi.org/10.1117/12.827723

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