On electrostatically actuated microsensors

Dumitru I. Caruntu; Martin W. Knecht

doi:10.1117/12.854961

31 March 2010 On electrostatically actuated microsensors

Dumitru I. Caruntu, Martin W. Knecht

Proceedings Volume 7647, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2010; 764713 (2010) https://doi.org/10.1117/12.854961
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2010, San Diego, California, United States

Abstract

Mass deposition changes resonance frequencies of structures. Resonator sensitivity, defined as a fraction of change in frequency per unit deposited mass, is found for microcantilever sensors electrostatically actuated to include fringe and Casimir effects. These actuation forces produce nonlinear parametric oscillations. Constant thickness mass deposition on all four lateral surfaces of the cantilever of rectangular cross-section was assumed. The Euler-Bernoulli theory was used under the assumption that the beams are slender. Mass deposition on the free end surface of the cantilever was neglected. The deposition thickness was considered uniform and very small compared to any beam dimension. The deposited mass had no contribution to the stiffness, only to the mass. Analytical expression of the sensitivity of electrostatically actuated uniform microcantilever resonators sensor near natural frequency is determined.

Citation Download Citation

Dumitru I. Caruntu and Martin W. Knecht "On electrostatically actuated microsensors", Proc. SPIE 7647, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2010, 764713 (31 March 2010); https://doi.org/10.1117/12.854961

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