Digital reflection holography based systems development for MEMS testing

Vijay Raj Singh; Sui Liansheng; Anand Asundi

doi:10.1117/12.858451

14 May 2010 Digital reflection holography based systems development for MEMS testing

Vijay Raj Singh, Sui Liansheng, Anand Asundi

Proceedings Volume 7718, Optical Micro- and Nanometrology III; 77180Z (2010) https://doi.org/10.1117/12.858451
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

MEMS are tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers and nanometers. Testing of MEMS device is an important part in carrying out their functional assessment and reliability analysis. Development of systems based on digital holography (DH) for MEMS inspection and characterization is presented in this paper. Two DH reflection systems, table-top and handheld types, are developed depending on the MEMS measurement requirements and their capabilities are presented. The methodologies for the systems are developed for 3D profile inspection and static & dynamic measurements, which is further integrated with in-house developed software that provides the measurement results in near real time. The applications of the developed systems are demonstrated for different MEMS devices for 3D profile inspection, static deformation/deflection measurements and vibration analysis. The developed systems are well suitable for the testing of MEMS and Microsystems samples, with full-field, static & dynamic inspection as well as to monitor micro-fabrication process.

Citation Download Citation

Vijay Raj Singh, Sui Liansheng, and Anand Asundi "Digital reflection holography based systems development for MEMS testing", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180Z (14 May 2010); https://doi.org/10.1117/12.858451

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