Development of MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica; Severin Waldis; Frederic Zamkotsian; Patrick Lanzoni; Wilfried Noell; Nico De Rooij

doi:10.1117/12.858258

20 July 2010 Development of MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico De Rooij

Proceedings Volume 7739, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation; 77394Q (2010) https://doi.org/10.1117/12.858258
Event: SPIE Astronomical Telescopes + Instrumentation, 2010, San Diego, California, United States

Abstract

We are developing MEMS-based programmable reflective slit masks for future generation infrared multi-object spectroscopy (MOS) for space and ground-based telescopes. These devices are composed of monocrystalline silicon micromirrors of size 200 × 100 um² which can be tilted by electrostatic actuation yielding a tilt-angle of 20°. An electromechanical clamping mechanism has been demonstrated providing uniform tilt-angle within one arc minute precision over the whole array (5 × 5 micromirrors). Slit masks of different sizes have been produced; the largest one measures 25 × 22 mm² and is composed of 20'000 micromirrors. Thanks to the architecture and the fabrication process of these slit masks; the micromirror peak-to-valley deformation (PTV) is uniform over the device and was measured being below 10 nm for uncoated micromirror. A slit mask of size 5 × 5 micromirrors was successfully tested in cryogenic conditions at 92 K; the micromirrors were actuated before, during and after the cryogenic experiment. To achieve for the large arrays a better fabrication yield and a higher reliability, the architecture, the process flow, the assembly and the electronics are being optimized. Optical characterizations as well as experiments of the large devices are underway.

Citation Download Citation

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, and Nico De Rooij "Development of MEMS-based programmable slit mask for multi-object spectroscopy", Proc. SPIE 7739, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation, 77394Q (20 July 2010); https://doi.org/10.1117/12.858258

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