Integrated circuit layer image segmentation

Giedrius Masalskis; Romas Petrauskas

doi:10.1117/12.872254

14 September 2010 Integrated circuit layer image segmentation

Giedrius Masalskis, Romas Petrauskas

Proceedings Volume 7745, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2010; 774517 (2010) https://doi.org/10.1117/12.872254
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2010, 2010, Wilga, Poland

Abstract

In this paper we present IC layer image segmentation techniques which are specifically created for precise metal layer feature extraction. During our research we used many samples of real-life de-processed IC metal layer images which were obtained using optical light microscope. We have created sequence of various image processing filters which provides segmentation results of good enough precision for our application. Filter sequences were fine tuned to provide best possible results depending on properties of IC manufacturing process and imaging technology. Proposed IC image segmentation filter sequences were experimentally tested and compared with conventional direct segmentation algorithms.

Citation Download Citation

Giedrius Masalskis and Romas Petrauskas "Integrated circuit layer image segmentation", Proc. SPIE 7745, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2010, 774517 (14 September 2010); https://doi.org/10.1117/12.872254

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