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The feasibility of using low energy (<30 eV) oxygen ions to clean optics has been demonstrated, It was found that the removal rate of a hydrocarbon film is between.10-23 and 10-24 cm /ion. These rates imply that a one meter diameter optic with a 1000 Å layer of organic contaminant can be cleaned with 10 mole (0.32 milligram) of oxygen impinging on the surface. The removal rate varied with the thickness of the film; the lower layers of the film were more difficult to remove than the outer layers. The effect of the ions on the scatter of a gold mirror was also studied. It was determined that the ions increased the scatter by less than a factor of two.
T. J. Deguchi andC. B. Kalem
"Oxygen Ion Cleaning Of Organic Contaminant Films", Proc. SPIE 0777, Optical Systems Contamination: Effects, Measurement, Control, (1 January 1987); https://doi.org/10.1117/12.967095
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T. J. Deguchi, C. B. Kalem, "Oxygen Ion Cleaning Of Organic Contaminant Films," Proc. SPIE 0777, Optical Systems Contamination: Effects, Measurement, Control, (1 January 1987); https://doi.org/10.1117/12.967095