Large-field high-energy KB microscope with aperiodic multilayer

Shengzhen Yi; Baozhong Mu; Zhanshan Wang; Xin Wang; Li Jiang; Jingtao Zhu

doi:10.1117/12.860271

1 September 2010 Large-field high-energy KB microscope with aperiodic multilayer

Shengzhen Yi, Baozhong Mu, Zhanshan Wang, Xin Wang, Li Jiang, Jingtao Zhu

Proceedings Volume 7801, Advances in Metrology for X-Ray and EUV Optics III; 78010C (2010) https://doi.org/10.1117/12.860271
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Periodic multilayer KB microscopes have widely implemented in x-ray diagnostic experiments of ICF, especially at relatively high x-ray energies (8keV or higher). But the obvious disadvantage, due to narrow bandwidth of periodic multilayer, is the ununiformity of x-ray image brightness and the limited field of view. The literature describes the characterization of a high-energy KB microscope with aperiodic multilayer configured to achieve larger effective field of view than existing periodic multilayer KB microscopes. The microscope, working on 8keV with grazing angles of 1.1330° and 1.1837°, is capable of 5μm resolution over ±200μm object field. Design of the multilayer and experimental results with a Cu x-ray tube will be shown.

Citation Download Citation

Shengzhen Yi, Baozhong Mu, Zhanshan Wang, Xin Wang, Li Jiang, and Jingtao Zhu "Large-field high-energy KB microscope with aperiodic multilayer", Proc. SPIE 7801, Advances in Metrology for X-Ray and EUV Optics III, 78010C (1 September 2010); https://doi.org/10.1117/12.860271

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