SOI (silicon-on-insulator)-based micro-resonator is the key building block of silicon photonics, which is considered as a
promising solution to alleviate the bandwidth bottleneck of on-chip interconnects. Silicon-based sub-micron waveguide,
microring and microdisk devices are investigated in Institute of Semiconductors, Chinese Academy of Sciences. The
main progress in recent years is presented in this talk, such as high Q factor single mode microdisk filters, compact thirdorder
microring filters with the through/drop port extinctions to be ~ 30/40 dB, fast microring electro-optical switches
with the switch time of < 400 ps and crosstalk < -23 dB, and > 10 Gbit/s high speed microring modulators.
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