The aim of this paper is to demonstrate the feasibility of an implantable, low voltage driven microfluidic pump
to deliver drugs. The micro pump has a high degree of biocompatibility and mechanical deformation capability,
thanks to the use of elastic silicone elastomers (PDMS) for integration and embedding of the pump. We are using
the new method of transverse DC electro-osmosis, which is demonstrated already in the literature. The method
uses the fabrication of periodic grooves on top of the micro channel and the application of a DC voltage across
the channel. In this contribution, for the first time the production and operation of soft elastic versions of such a
pump, compatible with body tissue, is demonstrated. For the interconnects, gold is selectively electro-deposited
on Cu-foil and is transferred to PDMS layer. Having only gold as the interconnect ascertains the high degree of
bio-compatibility of the device. This pump works with voltages about 10V and produces mean flow speeds of
about 60μm/s. The flow has also a helical profile which is a very good advantage to use this pump as a mixer
for micro fluidic applications. Flow rate is measured by introducing dyed micro particles along with the liquid
inside the channel.
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