Optimization of half-tone technology for diffractive microlens fabrication

V. P. Korolkov; R. K. Nasyrov; A. R. Sametov; S. A. Suhih

doi:10.1117/12.874432

7 February 2011 Optimization of half-tone technology for diffractive microlens fabrication

V. P. Korolkov, R. K. Nasyrov, A. R. Sametov, S. A. Suhih

Proceedings Volume 7957, Practical Holography XXV: Materials and Applications; 795710 (2011) https://doi.org/10.1117/12.874432
Event: SPIE OPTO, 2011, San Francisco, California, United States

Abstract

A new approach for the optimization of diffractive microlenses fabrication is presented. The problem is that fabrication process brings errors in profile formation. These errors decrease diffractive efficiency and wavefront quality. However, microlens quality can be increased by optimization of the fabrication process that takes into account transfer functions of technological equipment. We have applied this method for half-tone technology. Calibration samples were fabricated and transfer function was experimentally measured. Then initial half-tone mask was corrected and microlenses with higher quality were produced.

Citation Download Citation

V. P. Korolkov, R. K. Nasyrov, A. R. Sametov, and S. A. Suhih "Optimization of half-tone technology for diffractive microlens fabrication", Proc. SPIE 7957, Practical Holography XXV: Materials and Applications, 795710 (7 February 2011); https://doi.org/10.1117/12.874432

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