Tunable two-mirror laser interference lithography system for large-area nano-patterning

Weidong Mao; Ishan Wathuthanthri; Chang-Hwan Choi

doi:10.1117/12.879576

4 April 2011 Tunable two-mirror laser interference lithography system for large-area nano-patterning

Weidong Mao, Ishan Wathuthanthri, Chang-Hwan Choi

Proceedings Volume 7970, Alternative Lithographic Technologies III; 79701K (2011) https://doi.org/10.1117/12.879576
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

A novel laser interference lithography system with enhanced tunablility in pattern periodicity and coverage has been designed and tested for large-area nano-patterning in a wide range of a pattern frequency. The tunable feature has been achieved by using two rotational mirrors on expanded beam paths at specific angles for a designed period. With a 325 nm laser wavelength, uniform resist nano-patterns of 250, 500, and 750 nm have been experimentally demonstrated on a 4-inch silicon substrate. This new interferometer configuration offers a convenient and robust way to prepare large-area nanostructures with superior tunability in pattern periods.

Citation Download Citation

Weidong Mao, Ishan Wathuthanthri, and Chang-Hwan Choi "Tunable two-mirror laser interference lithography system for large-area nano-patterning", Proc. SPIE 7970, Alternative Lithographic Technologies III, 79701K (4 April 2011); https://doi.org/10.1117/12.879576

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available