Multi-selection method for physical design verification applications

Salma Mostafa; J. Andres Torres; Peter Rezk; Kareem Madkour

doi:10.1117/12.878463

4 April 2011 Multi-selection method for physical design verification applications

Salma Mostafa, J. Andres Torres, Peter Rezk, Kareem Madkour

Proceedings Volume 7974, Design for Manufacturability through Design-Process Integration V; 797407 (2011) https://doi.org/10.1117/12.878463
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

In this paper we present a modular approach which combines model based verification, pattern matching and machine learning methods in order to achieve a high accuracy over computing time ratio. We utilize pattern recognition technique using a supervised machine learning system (as opposed to pattern matching) to classify the patterns either as failures (hotspots) or non-failures, and we use pattern matching to detect all the outlier misses and false detections in each of the regions (based on the calibration set), which will be added or removed from the set of hotspots later on. Doing so allows us to do two things: Reduce the number of patterns that need to be pattern matched since only the outliers of the machine learning system need to be considered and more importantly it allows us to add trained predictability to new configurations that were not in the training set but that can be interpolated from the system. The results indicate that indeed it is possible to successfully combine Machine learning with pattern matching methods in order to achieve better predictability of errors of previously unseen data, while being exact in the treatment of previously observed data. We also explore possible avenues to further speed up the computation of the layout characterization process by inserting a global density grid, and assess the impact of model quality and aliasing under real detection conditions.

Citation Download Citation

Salma Mostafa, J. Andres Torres, Peter Rezk, and Kareem Madkour "Multi-selection method for physical design verification applications", Proc. SPIE 7974, Design for Manufacturability through Design-Process Integration V, 797407 (4 April 2011); https://doi.org/10.1117/12.878463

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available