Fiberoptic microphone using a polymeric cavity

Wei-Chih Wang; William Soetanto; Kebin Gu

doi:10.1117/12.880694

31 March 2011 Fiberoptic microphone using a polymeric cavity

Wei-Chih Wang, William Soetanto, Kebin Gu

Proceedings Volume 7984, Health Monitoring of Structural and Biological Systems 2011; 79842B (2011) https://doi.org/10.1117/12.880694
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2011, San Diego, California, United States

Abstract

The fabrication and experimental investigation of a fiberoptic microphone is described. The sensing element is a silicon diaphragm with gold thin film coating that is positioned inside a silicone rubber mold at the end of a single mode optical fiber. Thus, a Fabry-Perot interferometer is formed between the inner fiber and the diaphragm. An acoustic pressure change is detected by using the developed microphone. The polymeric cavity and silicon diaphragm-based system exhibits excellent physicochemical properties with a small, simple, low cost, and lightweight design. The system is also electromagnetic interference / radio frequency interference immunity due to the use of fiberoptics.

Citation Download Citation

Wei-Chih Wang, William Soetanto, and Kebin Gu "Fiberoptic microphone using a polymeric cavity", Proc. SPIE 7984, Health Monitoring of Structural and Biological Systems 2011, 79842B (31 March 2011); https://doi.org/10.1117/12.880694

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