Dynamically Focusing Electro-Optical Sensor-System For Micro Rofilometry

Breitmeier U.; Ahlers R J.

doi:10.1117/12.967118

1 January 1987 Dynamically Focusing Electro-Optical Sensor-System For Micro Rofilometry

Breitmeier U., Ahlers R J.

Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967118
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

Elektro-optical measurement systems for the measurement of microgeometries are of increasing importance in quality control. Disadvantages of the tactile probes can be avoided to a large extent by utilizing non-touching methods /1/. This holds for

Citation Download Citation

Breitmeier U. and Ahlers R J. "Dynamically Focusing Electro-Optical Sensor-System For Micro Rofilometry", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967118

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