Tip-based nanofabrication: an approach to true nanotechnology

Kristen P. Bloschock; Adam R. Schofield; Thomas W. Kenny

doi:10.1117/12.887266

13 May 2011 Tip-based nanofabrication: an approach to true nanotechnology

Kristen P. Bloschock, Adam R. Schofield, Thomas W. Kenny

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Proceedings Volume 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III; 803102 (2011) https://doi.org/10.1117/12.887266
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

True nanotechnology, defined as the ability to reliably and repeatably fabricate nanostructures with controlled differences in size, shape, and orientation at precise substrate locations, currently does not exist. There are many examples demonstrating the capability to grow, deposit, and manipulate nanometer-sized features, but typically these techniques do not allow for controllable manufacturing of individual structures. To bridge this gap and to unlock the true potential of nanotechnology for defense sensing applications, the Defense Advanced Research Projects Agency (DARPA) launched the Tip-Based Nanofabrication (TBN) research program with the intent of achieving controlled manufacturing of nanostructures using functionalized AFM cantilevers and tips. This work describes the background, goals, and recent advances achieved during the multi-year TBN program.

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Kristen P. Bloschock, Adam R. Schofield, and Thomas W. Kenny "Tip-based nanofabrication: an approach to true nanotechnology", Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 803102 (13 May 2011); https://doi.org/10.1117/12.887266

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KEYWORDS

Nanostructures

Nanolithography

Silicon

Nanofabrication

Nanotechnology

Scanning tunneling microscopy

Manufacturing

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