Paper
9 February 1987 Large Diffraction Grating Ruling Engine With Nanometer Digital Control System
Erwin G. Loewen, Robert S. Wiley, Geoffrey Portas
Author Affiliations +
Abstract
Modifications to the MIT-B grating ruling engine have recently been installed. In addition to a new ultra-quiet mechanical drive system for the diamond carriage an entirely new digital servo control system has been installed. It operates with a bit size of 0.09 nm, with virtually infinite control levels. Rowland ghost levels are no longer detectable, which implies that periodic error amplitudes are below 0.5 nm.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Erwin G. Loewen, Robert S. Wiley, and Geoffrey Portas "Large Diffraction Grating Ruling Engine With Nanometer Digital Control System", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); https://doi.org/10.1117/12.941737
Lens.org Logo
CITATIONS
Cited by 3 scholarly publications and 1 patent.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Interferometers

Diffraction gratings

Diamond

Servomechanisms

Mirrors

Control systems

Moire patterns

RELATED CONTENT


Back to Top