Experimental investigation on silicon microchannel plate electron multiplier

Qingduo Duanmu; Guozheng Wang; Ye Li; Yang Wang; Hongchang Cheng; Xulei Qin; Zhenhua Jiang; Delong Jiang

doi:10.1117/12.897420

18 August 2011 Experimental investigation on silicon microchannel plate electron multiplier

Qingduo Duanmu, Guozheng Wang, Ye Li, Yang Wang, Hongchang Cheng, Xulei Qin, Zhenhua Jiang, Delong Jiang

Proceedings Volume 8194, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Imaging Detectors and Applications; 81940G (2011) https://doi.org/10.1117/12.897420
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

A Silicon microchannel arrays with the very high aspect ratio was prepared by the photo-assisted electrochemical etching process. The mechanism of silicon anisotropy etching, the process parameters, the inducing pit arrays and the channel morphology were investigated, and the condition of etching current density for steady microchannel growth was discussed. The continuous SiO₂ thin film dynode was fabricated by LPCVD process. The insulation, conductive and electron emission layer of the dynodes were studied and prepared. We obtained the samples of silicon microchannel plate with 25 mm of the plate diameter, 4-6 μm of channel side size, 1-2 μm of the channel space, more than 40 of aspect ratio, 7° channel bias angle, and 165 of the electron gain at 680V working voltage. The experimental study on silicon microchannel plate indicates that the process of Silicon microchannel plate in this paper is feasible.

Citation Download Citation

Qingduo Duanmu, Guozheng Wang, Ye Li, Yang Wang, Hongchang Cheng, Xulei Qin, Zhenhua Jiang, and Delong Jiang "Experimental investigation on silicon microchannel plate electron multiplier", Proc. SPIE 8194, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Imaging Detectors and Applications, 81940G (18 August 2011); https://doi.org/10.1117/12.897420

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available