Invited Paper Models For Microstructure Evolution During Optical Thin Film Growth

K. H. Muller

doi:10.1117/12.941840

2 February 1988 Invited Paper Models For Microstructure Evolution During Optical Thin Film Growth

K. H. Muller

Proceedings Volume 0821, Modeling of Optical Thin Films; (1988) https://doi.org/10.1117/12.941840
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

In this study several recently developed theoretical models will be reported which help to understand some of the fundamental processes which occur at an atomic level during thin film growth. A simple stochastic lattice-gas model has been employed to reveal substrate temperature effects on columnar microstructure. Molecular-dynamics studies have been performed in order to elucidate the adatom-surface interaction and to simulate vapor, sputter and ion-assisted deposition. A collision cascade model for ion-assisted optical films has also been used and explains quantitatively the experimentally observed densification of optical films.

Citation Download Citation

K. H. Muller "Invited Paper Models For Microstructure Evolution During Optical Thin Film Growth", Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); https://doi.org/10.1117/12.941840

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