Periodic nano trench structure fabricated by high-speed scanning CW laser

Satoru Kaneko; Takeshi Ito; Manabu Yasui; Chihiro Kato; Satomi Tanaka; Takeshi Ozawa; Yasuo Hirabayashi; Akira Matsuno; Takashi Nire; Mamoru Yoshimoto

doi:10.1117/12.905970

15 February 2012 Periodic nano trench structure fabricated by high-speed scanning CW laser

Satoru Kaneko, Takeshi Ito, Manabu Yasui, Chihiro Kato, Satomi Tanaka, Takeshi Ozawa, Yasuo Hirabayashi, Akira Matsuno, Takashi Nire, Mamoru Yoshimoto

Author Affiliations +

Proceedings Volume 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII; 82430U (2012) https://doi.org/10.1117/12.905970
Event: SPIE LASE, 2012, San Francisco, California, United States

Abstract

We report periodic nanostructure on solid material irradiated by scanning continuous wave (CW) laser. Long periodic nano strip grating lines (nano-SGL) formed, not in a spot, but along the trace of the beam scan, literally parallel to each other with a at trough between the strip lines. The period of nanostructure was varied with the laser power between 500 nm and 800 nm, which equals to wavelengths used for laser scanning of green and infrared lasers. Thermal simulation and Raman spectra indicated the temperature of target exceeded the melting temperature to form the periodic nanostructure on target materials.

Citation Download Citation

Satoru Kaneko, Takeshi Ito, Manabu Yasui, Chihiro Kato, Satomi Tanaka, Takeshi Ozawa, Yasuo Hirabayashi, Akira Matsuno, Takashi Nire, and Mamoru Yoshimoto "Periodic nano trench structure fabricated by high-speed scanning CW laser", Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430U (15 February 2012); https://doi.org/10.1117/12.905970

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