A speckle-based CMOS sensor for arbitrary surface movement detection with correlated double sampling and gain error correction

Chao Wang; Steve Tanner; Pierre-André Farine

doi:10.1117/12.906206

2 February 2012 A speckle-based CMOS sensor for arbitrary surface movement detection with correlated double sampling and gain error correction

Chao Wang, Steve Tanner, Pierre-André Farine

Author Affiliations +

Proceedings Volume 8265, Optoelectronic Integrated Circuits XIV; 82650J (2012) https://doi.org/10.1117/12.906206
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

We present a CMOS sensor for accurate tracking of speckle movements on arbitrary surfaces. The sensor is made of a pair of comb filters with a pitch of 5.6μm and decayed by 90° to produce quadrature signals. The readout circuit is a 60 dB amplification chain with offset and KTC noise compensation. Integrated into a 180nm CMOS process, the sensor and readout circuit occupy an area of about 0.1mm² and consume 24μW at full speed of 64 ksample/s. The direction and frequency of the quadrature signals are resolved externally by zero-crossing detection, giving an accuracy of about 5μm. Thanks to a careful layout for gain error minimization, and the use of KTC noise cancellation, a negligible residual drift was observed, and a minimal displacement of 5μm was measured.

Citation Download Citation

Chao Wang, Steve Tanner, and Pierre-André Farine "A speckle-based CMOS sensor for arbitrary surface movement detection with correlated double sampling and gain error correction", Proc. SPIE 8265, Optoelectronic Integrated Circuits XIV, 82650J (2 February 2012); https://doi.org/10.1117/12.906206

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