The estimation of thermal properties of &#956;-bolometers in a FPA with some selected structures and pitches

Seung-man Park; Seungoh Han; Chang Suk Han; Hee Chul Lee

doi:10.1117/12.919623

31 May 2012 The estimation of thermal properties of μ-bolometers in a FPA with some selected structures and pitches

Seung-man Park, Seungoh Han, Chang Suk Han, Hee Chul Lee

Proceedings Volume 8353, Infrared Technology and Applications XXXVIII; 83531J (2012) https://doi.org/10.1117/12.919623
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

We present a thermal property estimation method required for a bolometer design and demonstrate the utilization of a presented method to the scaled μ-bolometers. The estimated thermal properties of 25μm pitch VOx bolometers with our presented method shows K=1.33x10^-8 W/K, H=1.36x10^-10 J/K, τ_th=10.2 ms for an active bolometer and K=1.64x10^-6 W/K, H=1.82x10^-10 J/K, τ_th=111 μs for a reference bolometer. These estimated thermal properties have a good agreement with the previous reports and with results from the FEM analyses carried on the same bolometer designs. The presented method is useful to estimate thermal properties of a scaled bolometer and to estimate thermal properties of a specific design.

Citation Download Citation

Seung-man Park, Seungoh Han, Chang Suk Han, and Hee Chul Lee "The estimation of thermal properties of μ-bolometers in a FPA with some selected structures and pitches", Proc. SPIE 8353, Infrared Technology and Applications XXXVIII, 83531J (31 May 2012); https://doi.org/10.1117/12.919623

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