Infrared focal plane array with a built-in stationary Fourier-transform spectrometer: recent technological advances

Yann Ferrec; Nicolas Guérineau; Sylvain Rommeluère; Sidonie Lefebvre; Florence de la Barrière; Gilles Lasfargues; Manuel Fendler

doi:10.1117/12.919387

31 May 2012 Infrared focal plane array with a built-in stationary Fourier-transform spectrometer: recent technological advances

Yann Ferrec, Nicolas Guérineau, Sylvain Rommeluère, Sidonie Lefebvre, Florence de la Barrière, Gilles Lasfargues, Manuel Fendler

Author Affiliations +

Proceedings Volume 8353, Infrared Technology and Applications XXXVIII; 835323 (2012) https://doi.org/10.1117/12.919387
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

A concept of Fourier-transform infrared spectrometer integrated on a focal plane array (FTIR-FPA) has been developed for very fast acquisition of spectral signatures. The basic idea is to use the upper surface of the focal plane array as the first mirror of a two-wave interferometer, which creates interference fringes directly inside the active layer. Two technologies have been developed. In a "monolithic" version of our FTIR-FPA concept, the cavity is made by grinding the substrate to the shape of a wedge. In a "hybrid" version, the cavity is made by hybridizing a Silicon plate just above the focal plane array.

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Yann Ferrec, Nicolas Guérineau, Sylvain Rommeluère, Sidonie Lefebvre, Florence de la Barrière, Gilles Lasfargues, and Manuel Fendler "Infrared focal plane array with a built-in stationary Fourier-transform spectrometer: recent technological advances", Proc. SPIE 8353, Infrared Technology and Applications XXXVIII, 835323 (31 May 2012); https://doi.org/10.1117/12.919387

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