Anti-reflection coating on calcium fluoride substrate using ion-assisted deposition

Yao-ping Zhang; Jun-qi Fan; Hong Xu

doi:10.1117/12.976048

16 October 2012 Anti-reflection coating on calcium fluoride substrate using ion-assisted deposition

Yao-ping Zhang, Jun-qi Fan, Hong Xu

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84161Q (2012) https://doi.org/10.1117/12.976048
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

The IR AR coating is of great importance in contemporary optics industry, thus in this theme we investigate deposition processes of anti-reflection coatings on calcium fluoride substrate using ion-assisted deposition, including single layer of ZnSYbF₃ and a multilayer coating of AR. These thin films are produced by thermal evaporation using ion-assisted deposition, and with their optical characteristics measured and calculated, we analyzed the influence of ion source parameters on coatings such as anode voltage, anode current, argon flow, and so on. Based on research upon, we finally put forward the appropriate parameters to deposition antireflection coating on calcium fluoride substrate, in which the anode voltage and anode current play important roles in influencing the index of refraction and extinction coefficient of single layer of ZnS and YbF₃ coatings in the infrared wavelength. Moreover, because of the ambient moisture, the anti-reflection coating deposition only work for ZnS and YbF₃, but a Y2O₃ layer can be added to protect the anti-reflection coating. In the end, we measured the coating with spectrometer and find out its average transmission reached 99.8%, which can satisfy the practical requirement.

Citation Download Citation

Yao-ping Zhang, Jun-qi Fan, and Hong Xu "Anti-reflection coating on calcium fluoride substrate using ion-assisted deposition", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84161Q (16 October 2012); https://doi.org/10.1117/12.976048

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