Computer-aided alignment of off-axis two-mirror reflective system

Wang Bin; Wu Fan; Ye Yu Tang

doi:10.1117/12.978174

15 October 2012 Computer-aided alignment of off-axis two-mirror reflective system

Wang Bin, Wu Fan, Ye Yu Tang

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84171S (2012) https://doi.org/10.1117/12.978174
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

To realize the fast, efficient alignment of off-axis two-mirror reflective system, the scheme of computer-aided alignment has been proposed. The misalignment state of the system has been simulated in Zemax, corresponding relationship between the misalignments and Zernike polynomial coefficients has been analyzed and the misalignment characteristics of the system have been summarized by Matlab. Finally, the alignment scheme was determined by analysis. In order to verify the scheme, an off-axis two-mirror reflective system has been aligned according to the value which was calculated in accordance with the alignment scheme. The result demonstrates that the alignment scheme is feasible to the system.

Citation Download Citation

Wang Bin, Wu Fan, and Ye Yu Tang "Computer-aided alignment of off-axis two-mirror reflective system", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84171S (15 October 2012); https://doi.org/10.1117/12.978174

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