Electrostatic focusing system with high value of demagnification

Artush A. Abgaryan; Eli Levi

doi:10.1117/12.970604

11 October 2012 Electrostatic focusing system with high value of demagnification

Artush A. Abgaryan, Eli Levi

Proceedings Volume 8486, Current Developments in Lens Design and Optical Engineering XIII; 84861D (2012) https://doi.org/10.1117/12.970604
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

For E-beam transmission and transforming we developed an electrostatic focusing device with extraordinary demagnification and abilities for 100% transmission of an electron beam with uniform distribution of current density. This experimental electrostatic focusing system consists of two sections; the first is field formation and second is field free - for measurement space¹. The purpose of this article is to present the experimental results from our electro-optical system. The measurement instrument used in the laboratory set up is an adjustable scanning system, which includes a faraday cup with a 14um diameter tungsten wire, for measuring different cross sections. The measurement of the crossover point is based on a combination of theoretical and experimental processes. The theoretical uses calculations from the “CPO”² program and the experimental measures different cross sections which are much larger than the diameter of the tungsten wire. Theoretically, from trajectory calculations, the crossover point is approximately 0.446μm. This estimation is obtained by drawing an isosceles triangle from the experimental results and comparing it to another isosceles triangle created from the theoretically calculated trajectories. Both triangles together have a geometrically proportional ratio and differ by about one percent or less. The design of the electrostatic focusing system is achieved utilizing the CGMR (Cone and Golden Mean Ratio) approach ^{1, 3 and 4}. This system is suitable for use in X-ray tubes5, e-beam lithography, SEM, high speed photonic technology, and also for any EOS.

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Artush A. Abgaryan and Eli Levi "Electrostatic focusing system with high value of demagnification", Proc. SPIE 8486, Current Developments in Lens Design and Optical Engineering XIII, 84861D (11 October 2012); https://doi.org/10.1117/12.970604

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KEYWORDS

Tungsten

Electron beam lithography

Electrodes

Imaging systems

CCD cameras

Scanning electron microscopy

X-rays

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