Large-scale dynamics of directed self-assembly defects on chemically pre-patterned surface

Kenji Yoshimoto; Takashi Taniguchi

doi:10.1117/12.2011826

26 March 2013 Large-scale dynamics of directed self-assembly defects on chemically pre-patterned surface

Kenji Yoshimoto, Takashi Taniguchi

Proceedings Volume 8680, Alternative Lithographic Technologies V; 86801I (2013) https://doi.org/10.1117/12.2011826
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Morphological defects of block copolymers are dynamically formed during the annealing step of directed self assembly (DSA) process. Understanding the dynamics of such defects is crucial to manufacture defect-free wafers, however it is not well-understood due to difficulties in in-situ measurements. In order to provide some insights into this problem, we have performed dynamic simulations of symmetric diblock copolymers on chemically pre-patterned surface. A simplified model, so-called the Ohta-Kawasaki (OK) model was employed in this study, whose free energy and chemical potential were expressed as a function of the local order parameters. Time evolution of the local order parameters were calculated numerically and iteratively from the equation of continuity. As a test case, the two-dimensional (2D) dynamic simulations were performed including thermal fluctuations. The time evolution of the lamella defects was successfully characterized as a function of the interactive strength between the diblock copolymers and the chemically pre-patterned surface. In the three dimensional (3D) dynamic simulations, some complicated morphologies formed on the chemically pre-patterned surface were found to be similar to those obtained from Monte Carlo simulations. Our preliminary simulation data prove that for small _χNs, dynamic simulations of diblock copolymers with OK model could be a powerful method to predict DSA defects with reasonable accuracy and with small computational cost.

Citation Download Citation

Kenji Yoshimoto and Takashi Taniguchi "Large-scale dynamics of directed self-assembly defects on chemically pre-patterned surface", Proc. SPIE 8680, Alternative Lithographic Technologies V, 86801I (26 March 2013); https://doi.org/10.1117/12.2011826

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available