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The dielectric properties of DLC films formed by bias plasma enhanced CVD of methane are examined. Capacitors with nickel, copper, aluminum, silicon and carbon film electrodes to the PLC film were formed. Resistivity and dielectric strength were determined, in relation to substrate and plasma energy and bias. PLC films with breakdown over 10 Volts/cm a, d CF (Dissipation Factor) less than .01 were used in capacitor structures. Five layer structures were evaluated.
J. L. Davidson,C. Ellis, andT. Baginski
"Multilevel DLC (Diamondlike Carbon) Capacitor Structure", Proc. SPIE 0871, Space Structures, Power, and Power Conditioning, (6 April 1988); https://doi.org/10.1117/12.943682
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J. L. Davidson, C. Ellis, T. Baginski, "Multilevel DLC (Diamondlike Carbon) Capacitor Structure," Proc. SPIE 0871, Space Structures, Power, and Power Conditioning, (6 April 1988); https://doi.org/10.1117/12.943682