Contour and flexure-actuated in-plane modes of AlN-based piezoelectric vibrating MEMS

V. Ruiz-Díaz; T. Manzaneque; J. Hernando-García; A. Ababneh; M. Kucera; A. N. Al-Omari; A. Bittner; U. Schmid; H. Seidel; J. L. Sánchez-Rojas

doi:10.1117/12.2017115

17 May 2013 Contour and flexure-actuated in-plane modes of AlN-based piezoelectric vibrating MEMS

V. Ruiz-Díaz, T. Manzaneque, J. Hernando-García, A. Ababneh, M. Kucera, A. N. Al-Omari, A. Bittner, U. Schmid, H. Seidel, J. L. Sánchez-Rojas

Author Affiliations +

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 876333 (2013) https://doi.org/10.1117/12.2017115
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

In this work, we study the modes of vibration for two different families of aluminium nitride-actuated piezoelectric microstructures: contour modes and flexure-actuated modes. For the contour modes, the structure vibrates at frequencies determined by its edge dimensions whereas for the flexure-actuated modes a suspended structure is displaced by the lateral bending of the flexures. We combine electrical and optical techniques to fully characterize the vibrating modes of these types of in-plane MEMS structures. An electronic speckle pattern interferometry technique is used for a full 3D detection of the movement of the structures. Quality factors as high as 5000 and motional resistance as low as 4 KOhm were obtained for in-plane modes in air and a quality factor as high as 300 was obtained for an in-plane structure with water on the top surface. This work shows the great flexibility in the selection of resonant modes in piezoelectric resonators and actuators, implemented by a proper design of the electrode layout geometry.

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V. Ruiz-Díaz, T. Manzaneque, J. Hernando-García, A. Ababneh, M. Kucera, A. N. Al-Omari, A. Bittner, U. Schmid, H. Seidel, and J. L. Sánchez-Rojas "Contour and flexure-actuated in-plane modes of AlN-based piezoelectric vibrating MEMS", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876333 (17 May 2013); https://doi.org/10.1117/12.2017115

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KEYWORDS

Electrodes

Microelectromechanical systems

Photomicroscopy

Resistance

Aluminum

Actuators

Cesium

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