Optical fiber relative-humidity sensor using Fabry–Perot cavity formed by e-beam evaporated dielectric films

Dongwen Lee; Weijing Xie; Minghong Yang; Yi Zhang; Zhi Zhuang

doi:10.1117/12.2031043

15 October 2013 Optical fiber relative-humidity sensor using Fabry–Perot cavity formed by e-beam evaporated dielectric films

Dongwen Lee, Weijing Xie, Minghong Yang, Yi Zhang, Zhi Zhuang

Author Affiliations +

Proceedings Volume 8924, Fourth Asia Pacific Optical Sensors Conference; 89240I (2013) https://doi.org/10.1117/12.2031043
Event: Asia Pacific Optical Sensors Conference 2013, 2013, Wuhan, China

Abstract

A fiber optic relative-humidity sensor with a low-fineness Fabry-Perot cavity is proposed and demonstrated. Manufactured by e-beam evaporation, the Fabry–Perot cavity composed of five-layer dielectric oxides has columnar and porous structures, which is sensitive to relative-humidity change of environment. Experimental investigation shows that the proposed sensor exhibits a sensitivity of 0.42 nm/%RH when the ambient relative humidity changes from 15.2%RH to 74.3%RH.

Citation Download Citation

Dongwen Lee, Weijing Xie, Minghong Yang, Yi Zhang, and Zhi Zhuang "Optical fiber relative-humidity sensor using Fabry–Perot cavity formed by e-beam evaporated dielectric films ", Proc. SPIE 8924, Fourth Asia Pacific Optical Sensors Conference, 89240I (15 October 2013); https://doi.org/10.1117/12.2031043

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