A Process For Monolithic Fabrication Of Microlenses On Integrated Circuits

Zoran D Popovic; Robert A Sprague; G A.N Connell

doi:10.1117/12.944557

2 June 1988 A Process For Monolithic Fabrication Of Microlenses On Integrated Circuits

Zoran D Popovic, Robert A Sprague, G A.N Connell

Proceedings Volume 0898, Miniature Optics and Lasers; (1988) https://doi.org/10.1117/12.944557
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

A microlens fabrication process is described which is based on commercially available IC processing materials. The lenses are formed on top of circular pedestals by melting a photoresist developed in a suitable pattern. Due to surface tension forces melting leads to formation of a spherical surface which is pinned by the sharp edge of the pedestal. The process gives microlenses of excellent quality which show diffraction limited resolution.

Citation Download Citation

Zoran D Popovic, Robert A Sprague, and G A.N Connell "A Process For Monolithic Fabrication Of Microlenses On Integrated Circuits", Proc. SPIE 0898, Miniature Optics and Lasers, (2 June 1988); https://doi.org/10.1117/12.944557

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