A New Method For Measuring The Form Of Diamond Turned Surfaces

Haiming Wang; Hangyu Mi

doi:10.1117/12.944690

11 May 1988 A New Method For Measuring The Form Of Diamond Turned Surfaces

Haiming Wang, Hangyu Mi

Proceedings Volume 0900, Imaging Applications in the Work World; (1988) https://doi.org/10.1117/12.944690
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

The Applied OPtics Laboratory currently imPorted a diamond turning lathe MSG-325. It is known that the lathe can cut workPieces with very high accuracy ( figure accuracy 0.00002 inch, surface finish 0.8 microinch Ra ). General method for measuring the sur-face form is interferometr9, but it needs a reference surface. For the asPheric surface and the surface with large aperture, it is very difficult to get a reference surface. We set uP a very simPle laser-CCD light diffraction analysis system. BY retrieving the Phase of diffraction light, we get the surface form. This method can be used to measure the asPheric surface without demanding of the refrence surface, and can be used to control the surface form on Production Process.

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Haiming Wang and Hangyu Mi "A New Method For Measuring The Form Of Diamond Turned Surfaces", Proc. SPIE 0900, Imaging Applications in the Work World, (11 May 1988); https://doi.org/10.1117/12.944690

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KEYWORDS

Diffraction

Aspheric lenses

Interferometry

Diamond

CCD image sensors

Charge-coupled devices

Sensors

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