Influence of litho patterning on DSA placement errors

Sander Wuister; Tamara Druzhinina; Davide Ambesi; Bart Laenens; Linda He Yi; Jo Finders

doi:10.1117/12.2048065

28 March 2014 Influence of litho patterning on DSA placement errors

Sander Wuister, Tamara Druzhinina, Davide Ambesi, Bart Laenens, Linda He Yi, Jo Finders

Proceedings Volume 9049, Alternative Lithographic Technologies VI; 90491O (2014) https://doi.org/10.1117/12.2048065
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Directed self-assembly of block copolymers is currently being investigated as a shrinking technique complementary to lithography. One of the critical issues about this technique is that DSA induces the placement error. In this paper, study of the relation between confinement by lithography and the placement error induced by DSA is demonstrated. Here, both 193i and EUV pre-patterns are created using a simple algorithm to confine two contact holes formed by DSA on a pitch of 45nm. Full physical numerical simulations were used to compare the impact of the confinement on DSA related placement error, pitch variations due to pattern variations and phase separation defects.

Citation Download Citation

Sander Wuister, Tamara Druzhinina, Davide Ambesi, Bart Laenens, Linda He Yi, and Jo Finders "Influence of litho patterning on DSA placement errors", Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90491O (28 March 2014); https://doi.org/10.1117/12.2048065

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available