Fully CMOS compatible photonics integrated on silicon substrates

Zhiyong Li; Hao Xu; Xi Xiao; Anastasia Nemkova; Yude Yu; Jinzhong Yu

doi:10.1117/12.2052306

1 May 2014 Fully CMOS compatible photonics integrated on silicon substrates

Zhiyong Li, Hao Xu, Xi Xiao, Anastasia Nemkova, Yude Yu, Jinzhong Yu

Proceedings Volume 9133, Silicon Photonics and Photonic Integrated Circuits IV; 91330E (2014) https://doi.org/10.1117/12.2052306
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

Photonic integrated circuits on silicon substrates are fully compatible with CMOS processes. The measurements show that light coupling with insertion loss of ~2 dB between grating waveguides and optical fibers, 60 Gbps optical modulation with Vpp of less than 4 V, and 4-port optical switches with cross-talk of < -12 dB and extinction ratio of > 15 dB. Another work shows that a depletion mode PN junction can be operated as a 40 Gbps photodetector under a special reverse bias of 7 - 8 V.

Citation Download Citation

Zhiyong Li, Hao Xu, Xi Xiao, Anastasia Nemkova, Yude Yu, and Jinzhong Yu "Fully CMOS compatible photonics integrated on silicon substrates", Proc. SPIE 9133, Silicon Photonics and Photonic Integrated Circuits IV, 91330E (1 May 2014); https://doi.org/10.1117/12.2052306

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