Paper
20 October 2014 Multilayer soft x-ray optics
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Abstract
Molecular Beam Epitaxy (MBE) is able to produce high purity, epitaxial multilayer films with well defined interfaces. This precise deposition control along with a number of in situ characterization instruments allows a high degree of control over the formation of multilayers. We have three MBE systems, each with characteristics suitable for a subset of possible materials, that we have used to produce a large variety of x-ray multilayers. Together these MBE systems contain Reflection High Energy Electron Diffraction (RHEED), Low Energy Electron Diffraction (LEED), Auger Electron Spectroscopy (AES), X-Ray Photoelectron Spectroscopy (XPS), Ion Scattering Spectroscopy (ISS), Secondary Ion Mass Spectroscopy (SIMS), and Scanning Tunneling Microscopy (STM). Here I provide an overview of the techniques the students, postdocs, visiting scientists, and collaborators have used to select the materials pairs we have grown and analyzed for our x-ray multilayers.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles M. Falco "Multilayer soft x-ray optics", Proc. SPIE 9186, Fifty Years of Optical Sciences at The University of Arizona, 91860M (20 October 2014); https://doi.org/10.1117/12.2063904
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KEYWORDS
Reflectivity

Mirrors

Multilayers

Superlattices

X-rays

Chemical elements

Interfaces

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