A New Reticle Set For Electrical Measurement Of Resolution, Proximity, Topography, Sidewall Spacer, And Stacked-Gate Structures

W. L. Stevenson

doi:10.1117/12.968363

1 January 1988 A New Reticle Set For Electrical Measurement Of Resolution, Proximity, Topography, Sidewall Spacer, And Stacked-Gate Structures

W. L. Stevenson

Author Affiliations +

Proceedings Volume 0921, Integrated Circuit Metrology, Inspection, and Process Control II; (1988) https://doi.org/10.1117/12.968363
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

The characterization of photolithographic resolution, proximity-imaging effects, topographic dependence, side-wall spacers, and stacked-gate etch is greatly facilitated through the use of microelectronic test structures. The test modules required were specifically designed to mimick typical linewidth structures that occur as a result of integrated circuit processing. The modules were designed into a generic test reticle set. The reticle set has been implemented on ASM, GCA, Nikon, and Ultratech Steppers. This paper describes the test structures, the measurement sequences, and presents examples of results to demonstrate the versatility and application of this design.

Citation Download Citation

W. L. Stevenson "A New Reticle Set For Electrical Measurement Of Resolution, Proximity, Topography, Sidewall Spacer, And Stacked-Gate Structures", Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); https://doi.org/10.1117/12.968363

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available