Removal of surface figure deformation due to gravity in optical test

Wei Gu; Fan Wu; Yong Liu; Xi Hou

doi:10.1117/12.2069597

18 September 2014 Removal of surface figure deformation due to gravity in optical test

Wei Gu, Fan Wu, Yong Liu, Xi Hou

Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 928209 (2014) https://doi.org/10.1117/12.2069597
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

For optical surface measurement with higher accuracy, a simple method for removing surface figure deformation due to gravity was adopted and its principle research and error analysis were conducted. Based on optical flat supporting case, properties of gravitational deformation of the tested sample was analyzed by finite element method (FEM). In order to verify high accuracy of FEM analysis, a method which could remove the original surface deviation of the reference and the tested from the test results was adopted. According to the method, difference between theoretical and experimental results represented by Root-Mean-Square (RMS) value was only 0.404 nm. The result shown that the FEM analysis is accurate enough and the surface figure deformation due to gravity could be removed from test results efficiently. The method discussed here could benefit the high accuracy optical measurement.

Citation Download Citation

Wei Gu, Fan Wu, Yong Liu, and Xi Hou "Removal of surface figure deformation due to gravity in optical test", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 928209 (18 September 2014); https://doi.org/10.1117/12.2069597

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available